Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6416638 | Power supply unit for sputtering device | Noboru Kuriyama, Yoshio Kawamata, Takashi Fujii | 2002-07-09 |
| 6113760 | Power supply apparatus for sputtering and a sputtering apparatus using the power supply apparatus | Noboru Kuriyama, Nobuaki Utsunomiya, Yuji Yasumoto | 2000-09-05 |