Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8997815 | Ultrasonic bonding apparatus | Takahiro Aizawa, Miki Mori | 2015-04-07 |
| 7880403 | Method of detecting an arc in a glow-discharge device and apparatus for controlling a high-frequency arc discharge | — | 2011-02-01 |
| 7695599 | Discharging power source, sputtering power source, and sputtering device | Kazuhiko Imagawa | 2010-04-13 |
| 7633242 | Method of detecting an arc in a glow-discharge device and apparatus for controlling a high-frequency arc discharge | — | 2009-12-15 |
| 7531070 | Sputtering power-supply unit | Kazuhiko Imagawa | 2009-05-12 |
| 7492105 | Method of detecting an arc in a glow-discharge device and apparatus for controlling a high-frequency arc discharge | — | 2009-02-17 |
| 7301286 | Method of detecting an arc in a glow-discharge device and apparatus for controlling a high-frequency arc discharge | — | 2007-11-27 |
| 6416638 | Power supply unit for sputtering device | Yutaka Yatsu, Yoshio Kawamata, Takashi Fujii | 2002-07-09 |
| 6113760 | Power supply apparatus for sputtering and a sputtering apparatus using the power supply apparatus | Yutaka Yatsu, Nobuaki Utsunomiya, Yuji Yasumoto | 2000-09-05 |
| 5721470 | Microwave generator apparatus comprising controller for automatically adjusting filament power of a magnetron | Hiroaki Oichi, Yoshiki Fukumoto | 1998-02-24 |
| 4351714 | Sputter-etching device | — | 1982-09-28 |
| 4221652 | Sputtering device | — | 1980-09-09 |