Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6113760 | Power supply apparatus for sputtering and a sputtering apparatus using the power supply apparatus | Noboru Kuriyama, Yutaka Yatsu, Nobuaki Utsunomiya | 2000-09-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6113760 | Power supply apparatus for sputtering and a sputtering apparatus using the power supply apparatus | Noboru Kuriyama, Yutaka Yatsu, Nobuaki Utsunomiya | 2000-09-05 |