Issued Patents All Time
Showing 151–157 of 157 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5661837 | Illumination optical apparatus and scanning exposure apparatus using the same | Noriaki Yamamoto | 1997-08-26 |
| 5617181 | Exposure apparatus and exposure method | Masamitsu Yanagihara, Hiroshi Shirasu | 1997-04-01 |
| 5594587 | Illumination device with allowable error amount of telecentricity on the surface of the object to be illuminated and exposure apparatus using the same | Hideki Komatsuda, Hideo Hirose | 1997-01-14 |
| 5581075 | Multi-beam scanning projection exposure apparatus and method with beam monitoring and control for uniform exposure of large area | Tsuyoshi Naraki, Masamitsu Yanagihara, Hiroshi Shirasu, Tomohide Hamada, Noriaki Yamamoto | 1996-12-03 |
| 5132809 | Image display apparatus | Hiroaki Suzuki | 1992-07-21 |
| 4939630 | Illumination optical apparatus | Masahiro Nakagawa, Koichi Matsumoto, Haruo Ozawa, Hiroshi Shirasu, Yuji Kudoh | 1990-07-03 |
| 4769750 | Illumination optical system | Koichi Matsumoto, Makoto Uehara | 1988-09-06 |