Issued Patents All Time
Showing 26–37 of 37 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6709874 | Method of manufacturing a metal cap layer for preventing damascene conductive lines from oxidation | — | 2004-03-23 |
| 6706588 | Method of fabricating an integrated circuit having embedded vertical capacitor | — | 2004-03-16 |
| 6692898 | Self-aligned conductive line for cross-point magnetic memory integrated circuits | — | 2004-02-17 |
| 6677635 | Stacked MIMCap between Cu dual damascene levels | Yi-Sheng Hsieh | 2004-01-13 |
| 6620701 | Method of fabricating a metal-insulator-metal (MIM) capacitor | — | 2003-09-16 |
| 6611453 | Self-aligned cross-point MRAM device with aluminum metallization layers | — | 2003-08-26 |
| 6451667 | Self-aligned double-sided vertical MIMcap | — | 2002-09-17 |
| 6440753 | Metal hard mask for ILD RIE processing of semiconductor memory devices to prevent oxidation of conductive lines | Joachim Nuetzel | 2002-08-27 |
| 6184134 | Dry process for cleaning residues/polymers after metal etch | Nirmal Chaudhary, George Stojakovic | 2001-02-06 |
| 6033984 | Dual damascene with bond pads | Rainer Florian Schnabel, Bruno Spuler | 2000-03-07 |
| 5903343 | Method for detecting under-etched vias | Rainer Florian Schnabel | 1999-05-11 |
| 5865901 | Wafer surface cleaning apparatus and method | Xiaoming Yin | 1999-02-02 |