Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10763275 | 3D NAND device | Lei Ye | 2020-09-01 |
| 10427185 | Patterning method | Qiang Wu, Chang-Miao Liu, Jianhua Ju, Charles K. Lee | 2019-10-01 |
| 10204809 | Method for thermal treatment using heat reservoir chamber | Qiang Wu, DEPING KONG | 2019-02-12 |
| 10105722 | Photoresist coating apparatus and methods | Yang Liu, Qiang Wu | 2018-10-23 |
| 9711529 | 3D NAND device and fabrication method thereof | Lei Ye | 2017-07-18 |
| 9645499 | Photoresist with top-coating photo-decomposable base for photolithography | — | 2017-05-09 |
| 9640446 | Semiconductor structure and fabrication method thereof | Lihua Ding, Weiming He | 2017-05-02 |
| 9606451 | Exposure apparatus, photolithographical reticles and exposure methods thereof | Qiang Wu, Chang-Miao Liu, Jing'an Hao, Yang Liu | 2017-03-28 |
| 9576828 | Heat reservoir chamber, and method for thermal treatment | Qiang Wu, DEPING KONG | 2017-02-21 |
| 9547236 | Patterning apparatus and patterning methods thereof | Qiang Wu, Chang-Miao Liu, Jianhua Ju, Charles K. Lee | 2017-01-17 |
| 9298099 | Exposure apparatus and exposure method thereof | Qiang Wu, Yanlei Zu, Yiming Gu | 2016-03-29 |
| 8563201 | Mask, manufacturing method thereof and mask haze monitoring method | Shijian Zhang | 2013-10-22 |