Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9606451 | Exposure apparatus, photolithographical reticles and exposure methods thereof | Qiang Wu, Chang-Miao Liu, Huayong Hu, Yang Liu | 2017-03-28 |
| 9298103 | Cylindrical reticle system, exposure apparatus and exposure method | Qiang Wu, Chang-Miao Liu | 2016-03-29 |
| 9223229 | Exposure device and exposure method | Qiang Wu, Chang-Miao Liu, Xin Yao, Tianhui Li, Qiang SHU +1 more | 2015-12-29 |
| 9134624 | Lithography machine and scanning and exposing method thereof | Qiang Wu, Chang-Miao Liu, Xin Yao, Tianhui Li, Qiang SHU +1 more | 2015-09-15 |