Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10163806 | Photolithography alignment mark structures and semiconductor structures | Yi Huang | 2018-12-25 |
| 9946155 | Photolithographic mask | Yi Huang | 2018-04-17 |
| 9829788 | Photolithographic mask and fabrication method thereof | Yi Huang | 2017-11-28 |
| 9679822 | Method for monitoring epitaxial growth geometry shift | Lingbing Chen, Yiming Gu | 2017-06-13 |
| 9645096 | Method and system for optical measurements | Yi Huang | 2017-05-09 |
| 9620458 | Photolithography alignment mark structures, semiconductor structures, and fabrication method thereof | Yi Huang | 2017-04-11 |
| 9406515 | Laser annealing device including tunable mask and method of using the same | — | 2016-08-02 |
| 9348215 | Photolithographic masks and fabrication method thereof | — | 2016-05-24 |
| 9316925 | Methods for monitoring source symmetry of photolithography systems | — | 2016-04-19 |
| 9257287 | Laser annealing device and method | — | 2016-02-09 |
| 9105079 | Method and system for obtaining optical proximity correction model calibration data | — | 2015-08-11 |
| 9019152 | Standard wafer and its fabrication method | Yanlei Zu | 2015-04-28 |
| 8829424 | Method and apparatus for monitoring electron beam condition of scanning electron microscope | Yi Huang | 2014-09-09 |
| 8742345 | Method for detecting electron beam of scanning electron microscope and for detecting fine patterns | — | 2014-06-03 |