Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10163806 | Photolithography alignment mark structures and semiconductor structures | Boxiu Cai | 2018-12-25 |
| 9946155 | Photolithographic mask | Boxiu Cai | 2018-04-17 |
| 9829788 | Photolithographic mask and fabrication method thereof | Boxiu Cai | 2017-11-28 |
| 9645096 | Method and system for optical measurements | Boxiu Cai | 2017-05-09 |
| 9620458 | Photolithography alignment mark structures, semiconductor structures, and fabrication method thereof | Boxiu Cai | 2017-04-11 |
| 8829424 | Method and apparatus for monitoring electron beam condition of scanning electron microscope | Boxiu Cai | 2014-09-09 |