| 6756670 |
Electronic device and its manufacturing method |
Shunpei Yamazaki, Mitsunori Tsuchiya, Kazuo Urata, Itaru Koyama, Shigenori Hayashi +4 more |
2004-06-29 |
| 6191492 |
Electronic device including a densified region |
Shunpei Yamazaki, Mitsunori Tsuchiya, Kazuo Urata, Itaru Koyama, Shigenori Hayashi +4 more |
2001-02-20 |
| 5283087 |
Plasma processing method and apparatus |
Shunpei Yamazaki, Mitsunori Tsuchiya, Atsushi Kawano, Kazuhisa Nakashita, Toshiji Hamatani +2 more |
1994-02-01 |
| 5256483 |
Plasma processing method and apparatus |
Shunpei Yamazaki, Mitsunori Tsuchiya, Atsushi Kawano, Kazuhisa Nakashita, Toshiji Hamatani +2 more |
1993-10-26 |
| 5147822 |
Plasma processing method for improving a package of a semiconductor device |
Shunpei Yamazaki, Mitsunori Tsuchiya, Kazuo Urata, Itaru Koyama, Shigenori Hayashi +4 more |
1992-09-15 |
| 5079031 |
Apparatus and method for forming thin films |
Shunpei Yamazaki, Noriya Ishida, Mari Sasaki, Mitsunori Sakama, Takeshi Fukada +6 more |
1992-01-07 |
| 5013688 |
Method of manufacturing a semiconductor using plasma processing |
Shunepi Yamazaki, Kazuo Urata, Itaru Koyama, Noriya Ishida, Mari Sasaki +2 more |
1991-05-07 |
| 5007374 |
Apparatus for forming thin films in quantity |
Shunpei Yamazaki, Mitsunori Tsuchiya, Kenji Itoh, Takashi Inushima, Atsushi Kawano |
1991-04-16 |
| 4987004 |
Plasma processing method and apparatus |
Shunpei Yamazaki, Mitsunori Tsuchiya, Atsushi Kawano, Kazuhisa Nakashita, Toshiji Hamatani +2 more |
1991-01-22 |
| 4971667 |
Plasma processing method and apparatus |
Shunpei Yamazaki, Mitsunori Tsuchiya, Atsushi Kawano, Kazuhisa Nakashita, Toshiji Hamatani +2 more |
1990-11-20 |
| 4970366 |
Laser patterning apparatus and method |
Hisato Shinohara |
1990-11-13 |