Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6638800 | Laser processing apparatus and laser processing process | Hiroaki Ishihara, Hideto Ohnuma, Nobuhiro Tanaka, Hiroki Adachi | 2003-10-28 |
| 5891764 | Laser processing apparatus and laser processing process | Hiroaki Ishihara, Hideto Ohnuma, Nobuhiro Tanaka, Hiroki Adachi | 1999-04-06 |
| 5643801 | Laser processing method and alignment | Hiroaki Ishihara, Hideto Ohnuma, Nobuhiro Tanaka, Hiroki Adachi | 1997-07-01 |
| 5283087 | Plasma processing method and apparatus | Shunpei Yamazaki, Mitsunori Tsuchiya, Atsushi Kawano, Shinji Imatou, Toshiji Hamatani +2 more | 1994-02-01 |
| 5256483 | Plasma processing method and apparatus | Shunpei Yamazaki, Mitsunori Tsuchiya, Atsushi Kawano, Shinji Imatou, Toshiji Hamatani +2 more | 1993-10-26 |
| 5079031 | Apparatus and method for forming thin films | Shunpei Yamazaki, Shinji Imatou, Noriya Ishida, Mari Sasaki, Mitsunori Sakama +6 more | 1992-01-07 |
| 5013688 | Method of manufacturing a semiconductor using plasma processing | Shunepi Yamazaki, Kazuo Urata, Itaru Koyama, Noriya Ishida, Mari Sasaki +2 more | 1991-05-07 |
| 4987004 | Plasma processing method and apparatus | Shunpei Yamazaki, Mitsunori Tsuchiya, Atsushi Kawano, Shinji Imatou, Toshiji Hamatani +2 more | 1991-01-22 |
| 4971667 | Plasma processing method and apparatus | Shunpei Yamazaki, Mitsunori Tsuchiya, Atsushi Kawano, Shinji Imatou, Toshiji Hamatani +2 more | 1990-11-20 |