Issued Patents All Time
Showing 126–150 of 502 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8045271 | Laser irradiation method and laser irradiation apparatus | Hirotada Oishi | 2011-10-25 |
| 8044372 | Laser apparatus, laser irradiation method, semiconductor manufacturing method, semiconductor device, and electronic equipment | Shunpei Yamazaki, Hidekazu Miyairi, Aiko Shiga, Akihisa Shimomura, Mai Akiba | 2011-10-25 |
| 8043969 | Method for manufacturing semiconductor device | Hidekazu Miyairi, Hironobu Shoji, Shunpei Yamazaki | 2011-10-25 |
| 8022380 | Laser irradiation method in which a distance between an irradiation object and an optical system is controlled by an autofocusing mechanism and method for manufacturing semiconductor device using the same | Yoshiaki Yamamoto | 2011-09-20 |
| 8023599 | Interfering signal characterizing quantity storing method and device, interfering signal characterizing quantity acquiring method and device, and interfering signal suppressing method and device | Naganori Shirakata, Yoshio Urabe, Tsutomu Mukai, Kenji Miyanaga, Koji Imamura +1 more | 2011-09-20 |
| 8003958 | Apparatus and method for doping | Shunpei Yamazaki, Toshiji Hamatani | 2011-08-23 |
| 8003499 | Laser irradiating device, laser irradiating method and manufacturing method of semiconductor device | — | 2011-08-23 |
| 8000016 | Laser irradiation apparatus and manufacturing method of semiconductor device | Hirotada Oishi | 2011-08-16 |
| 7989316 | Method of manufacturing semiconductor device | Akihisa Shimomura, Tatsuya Mizoi, Hidekazu Miyairi | 2011-08-02 |
| 7983311 | Signal detection device and signal detection method | Shuya Hosokawa, Naganori Shirakata, Kenji Miyanaga, Koji Imamura | 2011-07-19 |
| 7981766 | Manufacturing method and manufacturing apparatus of semiconductor | Shunpei Yamazaki | 2011-07-19 |
| 7981733 | Laser irradiation method, laser irradiation apparatus, and semiconductor device | Shunpei Yamazaki | 2011-07-19 |
| 7968453 | Method for manufacturing display device, and etching apparatus | Masafumi Morisue | 2011-06-28 |
| 7953310 | Beam homogenizer, laser irradiation apparatus, and method for manufacturing semiconductor device | Tomoaki Moriwaka | 2011-05-31 |
| 7951654 | Method of fabricating semiconductor device | — | 2011-05-31 |
| 7943885 | Laser irradiation method and method of manufacturing semiconductor device | Hidekazu Miyairi, Aiko Shiga, Akihisa Shimomura, Atsuo Isobe | 2011-05-17 |
| 7943287 | Method for manufacturing display device | Shunpei Yamazaki, Hironobu Shoji, Yasuyuki Arai | 2011-05-17 |
| 7940441 | Manufacturing method of memory element, laser irradiation apparatus, and laser irradiation method | Hirotada Oishi | 2011-05-10 |
| 7939435 | Laser annealing method | Naoto Kusumoto | 2011-05-10 |
| 7935584 | Method for manufacturing crystalline semiconductor device | Tomoaki Moriwaka | 2011-05-03 |
| 7929154 | Laser irradiation apparatus and laser irradiation method and method for manufacturing semiconductor device | Yoshiaki Yamamoto | 2011-04-19 |
| 7927983 | Laser irradiation method, laser irradiation apparatus, and method of manufacturing a semiconductor device | Tomoaki Moriwaka | 2011-04-19 |
| 7920611 | Laser apparatus, laser irradiation method, and manufacturing method of semiconductor device | Hidekazu Miyairi, Akihisa Shimomura, Tamae Takano, Masaki Koyama | 2011-04-05 |
| 7919726 | Laser irradiation apparatus, laser irradiation method, and method for manufacturing a semiconductor device | — | 2011-04-05 |
| 7916987 | Beam homogenizer, laser irradiation apparatus, and method for manufacturing semiconductor device | Hirotada Oishi | 2011-03-29 |