Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12046466 | Method and apparatus for treating substrate | Yong Jun SEO, Hyun YOON, Jungsuk Goh, Byeong Geun Kim, Yoonki SA +6 more | 2024-07-23 |
| 11809158 | Apparatus and method for treating substrate based on defect values of transfer paths | Tae Woong SEO, Taerim Lee | 2023-11-07 |
| 11139171 | Substrate treating apparatus and substrate treating method | — | 2021-10-05 |
| 10395930 | Substrate treating apparatus and substrate treating method | — | 2019-08-27 |