Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9864361 | Flexible temperature compensation systems and methods for substrate processing systems | Andrew D. Bailey, III | 2018-01-09 |
| 7113842 | Method for transferring process control models between plasma processing chambers | Kevin J. O'Leary, Francisco Martinez | 2006-09-26 |
| 7062411 | Method for process control of semiconductor manufacturing equipment | Michael Hopkins, John Scanlan, Kevin J. O'Leary | 2006-06-13 |