Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7062411 | Method for process control of semiconductor manufacturing equipment | Michael Hopkins, Kevin J. O'Leary, Marcus Carbery | 2006-06-13 |
| 6855209 | Plasma chamber cleaning | Kevin J. O'Leary | 2005-02-15 |
| 6826489 | Fault classification in a plasma process chamber | Michael Hopkins | 2004-11-30 |
| 6781383 | Method for fault detection in a plasma process | Kevin J. O'Leary, Ciaran O'Morain | 2004-08-24 |
| 6677246 | Endpoint detection in the etching of dielectric layers | Michael Hopkins | 2004-01-13 |
| 6656848 | Plasma chamber conditioning | Kevin J. O'Leary, Barry Coonan | 2003-12-02 |
| 6644349 | In-tank water conditioner valve | Bradley Martin | 2003-11-11 |
| 6441620 | Method for fault identification in a plasma process | Justin Lawler, Stephen Daniels | 2002-08-27 |
| 5690504 | Plastic guide pin with steel core | Gerald P. Grassett | 1997-11-25 |