Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10031109 | Optoacoustic inspection device for inspection of semiconductor wafers | Chanel Moira Pia Hayden, Patrick McNally | 2018-07-24 |
| 9842726 | Method and apparatus for the detection of arc events during the plasma processing of a wafer, surface of substrate | Shane Glynn, Felipe Soberon, Paul Maguire | 2017-12-12 |
| 8945467 | Method and apparatus for the sterilisation of articles | Felipe Soberon, Shane Glynn, Paul Maguire | 2015-02-03 |
| 8242789 | Plasma system and measurement method | Justin Lawler, Victor John Law | 2012-08-14 |
| 6441620 | Method for fault identification in a plasma process | John Scanlan, Justin Lawler | 2002-08-27 |