Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7279252 | Substrate for the micro-lithography and process of manufacturing thereof | Lutz Aschke, Markus Schweizer, Jochen Alkemper, Axel Schindler, Frank Frost +1 more | 2007-10-09 |