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Interconnects containing serpentine line structures for three-dimensional memory devices and methods of making the same |
Yuji Takahashi, Chun-Ming Wang, Vincent Shih |
2020-02-04 |
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Self-aligned isolation dielectric structures for a three-dimensional memory device |
Zhenyu Lu, Kota Funayama, Chun-Ming Wang, Jixin Yu, Tong Zhang +4 more |
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Bridge line structure for bit line connection in a three-dimensional semiconductor device |
Chun-Ming Wang, Yuki Mizutani, Hiroaki Koketsu, Masayuki Hiroi, Masaaki Higashitani |
2017-04-04 |
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Method and mask for enhancing the resolution of patterning 2-row holes |
Chun-Ming Wang, Masaaki Higashitani |
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| 8026172 |
Method of forming contact hole arrays using a hybrid spacer technique |
Chun-Ming Wang, Masaaki Higashitani |
2011-09-27 |