Issued Patents All Time
Showing 26–30 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6815350 | Method for forming a thin film using an atomic layer deposition (ALD) process | Young Seok Kim, Man-Sung Kang, Jae Young Ahn | 2004-11-09 |
| 6740977 | Insulating layers in semiconductor devices having a multi-layer nanolaminate structure of SiNx thin film and BN thin film and methods for forming the same | Jae Young Ahn, Young Seok Kim, Man-Sug Kang | 2004-05-25 |
| 6416584 | Apparatus for forming a film on a substrate | Seok-Jun Won, Young-Wook Park | 2002-07-09 |
| 6207489 | Method for manufacturing capacitor of semiconductor memory device having tantalum oxide film | Kab-jin Nam, Seok-Jun Won, Ki-Yeon Park, Young-Wook Park | 2001-03-27 |
| 5523255 | Method for forming a device isolation film of a semiconductor device | Don-young Ku, Byung-Hong Chung, Yong-Oon HWANG, Hung-Mo Yang, Yun-seung Shin | 1996-06-04 |