Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6815350 | Method for forming a thin film using an atomic layer deposition (ALD) process | Young Seok Kim, Yong-Woo Hyung, Jae Young Ahn | 2004-11-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6815350 | Method for forming a thin film using an atomic layer deposition (ALD) process | Young Seok Kim, Yong-Woo Hyung, Jae Young Ahn | 2004-11-09 |