Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9589795 | Method of forming an epitaxial layer on a substrate, and apparatus and system for performing the same | Sung Ho Kang, Bong-Jin Kuh, Sung-Ho Heo, Hee Seok Kim, Yong-Sung Park | 2017-03-07 |
| 9269578 | Method of forming an epitaxial layer on a substrate, and apparatus and system for performing the same | Sung Ho Kang, Bong-Jin Kuh, Sung-Ho Heo, Hee Seok Kim, Yong-Sung Park | 2016-02-23 |
| 9159591 | Batch type apparatus for manufacturing semiconductor devices | Cheol-Kyu Yang, Seog-Min Lee, Chul-Young Jang, Dong Min SON, Byung-Ho Ahn +2 more | 2015-10-13 |