Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9666459 | Apparatus for processing wafers | Seog-Min Lee, Chul-Young Jang, Dong Min SON, Byung-Ho Ahn | 2017-05-30 |
| 9159591 | Batch type apparatus for manufacturing semiconductor devices | Seog-Min Lee, Chul-Young Jang, Dong Min SON, Byung-Ho Ahn, Du-Han Jeon +2 more | 2015-10-13 |
| 7189661 | Method of forming silicon oxynitride layer in semiconductor device and apparatus of forming the same | Young-Sub You, Woong Lee, Jae Chul Lee, Hun-Hyeoung Leam | 2007-03-13 |
| 7131456 | Mass flow controller | Sung Ho Kang, Sung Wook JUNG, In-Pil Cha | 2006-11-07 |