Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9666459 | Apparatus for processing wafers | Cheol-Kyu Yang, Chul-Young Jang, Dong Min SON, Byung-Ho Ahn | 2017-05-30 |
| 9159591 | Batch type apparatus for manufacturing semiconductor devices | Cheol-Kyu Yang, Chul-Young Jang, Dong Min SON, Byung-Ho Ahn, Du-Han Jeon +2 more | 2015-10-13 |
| 7425761 | Method of manufacturing a dielectric film in a capacitor | Jae-Hyoung Choi, Sung Ho Kang, Jung-hee Chung, Jong-Bom Seo, Young Min Kim | 2008-09-16 |
| 7140384 | Substrate processing equipment having mass flow controller | Sung Ho Kang, Sung Wook JUNG, Yong Suk Kim | 2006-11-28 |