Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9786486 | Parallel multi wafer axial spin clean processing using spin cassette inside movable process chamber | Amuldeep S. Brar, Nampyo Lee | 2017-10-10 |
| 7431855 | Apparatus and method for removing photoresist from a substrate | Donggyun Han, Changki Hong, Sangjun Choi, Hyungho Ko, Hyosan Lee | 2008-10-07 |
| 6818384 | Methods of fabricating microelectronic features by forming intermixed layers of water-soluble resins and resist materials | Sangjun Choi, Sihyeung Lee, Hyoungdo Kim | 2004-11-16 |