Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9786486 | Parallel multi wafer axial spin clean processing using spin cassette inside movable process chamber | Amuldeep S. Brar, Woosung Han | 2017-10-10 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9786486 | Parallel multi wafer axial spin clean processing using spin cassette inside movable process chamber | Amuldeep S. Brar, Woosung Han | 2017-10-10 |