Issued Patents All Time
Showing 26–30 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8802571 | Method of hard mask CD control by Ar sputtering | Qian Fu | 2014-08-12 |
| 8609546 | Pulsed bias plasma process to control microloading | Qian Fu, Shenjian Liu, Bryan Pu | 2013-12-17 |
| 8518282 | Method of controlling etch microloading for a tungsten-containing layer | Qian Fu, Shenjian Liu, Bryan Pu | 2013-08-27 |
| 8124538 | Selective etch of high-k dielectric material | In Deog BAE, Qian Fu, Shenjian Liu | 2012-02-28 |
| 7629255 | Method for reducing microloading in etching high aspect ratio structures | Qian Fu, Shenjian Liu, Bryan Pu | 2009-12-08 |