Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9034156 | Sputtering apparatus | Tae-Hoon Yang, Ki-Yong Lee, Jin-Wook Seo, Byoung-Keon Park, Yun-Mo Chung +12 more | 2015-05-19 |
| 8890067 | Inspection system using scanning electron microscope | Young Gil PARK, Ki-Won Oh | 2014-11-18 |
| 8771420 | Substrate processing apparatus | Heung-Yeol Na, Ki-Yong Lee, Jin-Wook Seo, Min Jae Jeong, Jong-Won Hong +12 more | 2014-07-08 |
| 8373097 | Apparatus for thermally processing substrate | Heung-Yeol Na, Min Jae Jeong, Jong-Won Hong, Eu-Gene Kang, Seok Chang +12 more | 2013-02-12 |