Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9034156 | Sputtering apparatus | Tae-Hoon Yang, Ki-Yong Lee, Jin-Wook Seo, Byoung-Keon Park, Yun-Mo Chung +12 more | 2015-05-19 |
| 8899174 | Device and method for fabricating display device | Won-Hyouk Jang, Joo-Hwa Lee, Min-Jeong Hwang | 2014-12-02 |
| 8889214 | Deposition amount measuring apparatus, depositing apparatus including the same, and method for manufacturing light emitting display | Kyung Soo Kim, Seong-ho Jeong, Hyun-Keun Song | 2014-11-18 |
| 8882976 | Magnetron unit moving apparatus for preventing magnetization and magnetron sputtering equipment having the same | Yun-Mo Chung, Min Jae Jeong, Jong-Won Hong, Heung-Yeol Na, Ki-Yong Lee | 2014-11-11 |
| 8815016 | Heating unit and substrate processing apparatus having the same | Jong-Won Hong, Min Jae Jeong, Heung-Yeol Na, Seok Chang | 2014-08-26 |
| 8771420 | Substrate processing apparatus | Heung-Yeol Na, Ki-Yong Lee, Jin-Wook Seo, Min Jae Jeong, Jong-Won Hong +12 more | 2014-07-08 |
| 8658002 | System for sputtering and method thereof | Won-Hyouk Jang | 2014-02-25 |
| 8546248 | Method of forming polycrystalline silicon layer and atomic layer deposition apparatus used for the same | Yun-Mo Chung, Ki-Yong Lee, Min Jae Jeong, Jin-Wook Seo, Jong-Won Hong +12 more | 2013-10-01 |
| 8486195 | Atomic layer deposition apparatus and method of fabricating atomic layer using the same | Heung-Yeol Na, Ki-Yong Lee, Min Jae Jeong, Jong-Won Hong, Yun-Mo Chung +12 more | 2013-07-16 |
| 8373097 | Apparatus for thermally processing substrate | Heung-Yeol Na, Min Jae Jeong, Jong-Won Hong, Seok Chang, Ki-Yong Lee +12 more | 2013-02-12 |
| 8366832 | Driving shaft of effusion cell for deposition system and deposition system having the same | Sung Wha Jung | 2013-02-05 |
| 8343281 | Source gas supply unit, and deposition apparatus and method using the same | Jong-Won Hong, Min Jae Jeong, Heung-Yeol Na, Seok Chang | 2013-01-01 |
| 8048783 | Method of forming polycrystalline silicon layer and atomic layer deposition apparatus used for the same | Yun-Mo Chung, Ki-Yong Lee, Min Jae Jeong, Jin-Wook Seo, Jong-Won Hong +12 more | 2011-11-01 |
| 7765669 | Method of forming shadow mask pattern | Jin K. Kim, Sang Jin Han, Hee-Cheol Kang, Tae Hyung Kim | 2010-08-03 |
| 7744328 | Apparatus for aligning a tray and tray holder | Sung Wha Jung, Sang Jin Han | 2010-06-29 |
| 7486397 | Device for aligning substrate with mask and method using the same | Sung Wha Jung, Sang Jin Han | 2009-02-03 |