Issued Patents All Time
Showing 26–28 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5833425 | Semiconductor device manufacturing apparatus employing vacuum system | Jae-Sun Jeon, Won-Yeong Kim, Yun-mo Yang | 1998-11-10 |
| 5746832 | Apparatus for depositing particles onto a wafer | Byung-Seol Ahn, Sang-kyu Hahm, Jong Soo Kim | 1998-05-05 |
| 5654205 | Apparatus and method for depositing particles onto a wafer | Byung-Seol Ahn, Sang-kyu Hahm, Jong Soo Kim | 1997-08-05 |