Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11397380 | Critical dimension measurement system and method of measuring critical dimensions using same | Won Joo Park, Hyung Joo Lee, Dong-Seok Nam, Yoon Taek Han | 2022-07-26 |
| 10831095 | Critical dimension measurement system and method of measuring critical dimensions using same | Won Joo Park, Hyung Joo Lee, Dong-Seok Nam, Yoon Taek Han | 2020-11-10 |
| 9892500 | Method for grouping region of interest of mask pattern and measuring critical dimension of mask pattern using the same | Hyung Joo Lee, Won Joo Park, Byung-Gook Kim, Dong-Hoon Chung | 2018-02-13 |