Issued Patents All Time
Showing 26–30 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7275865 | Temperature measuring apparatus using change of magnetic field | Tae Gyu Kim | 2007-10-02 |
| 7208878 | Method of manufacturing a rotation-magnetron-in-magnetron (RMIM) electrode | Jai-kwang Shin, Young-kyou Park, Hyeon-ill Um | 2007-04-24 |
| 7119489 | Rotation-magnetron-in-magnetron (RMIM) electrode, method of manufacturing the RMIM electrode, and sputtering apparatus including the RMIM electrode | Jai-kwang Shin, Young-kyou Park, Hyeon-ill Um | 2006-10-10 |
| 7081710 | Elementary plasma source and plasma generation apparatus using the same | Andrei Petrin, Jai-kwang Shin, Jae-joon Oh, Ji-hyun Hur | 2006-07-25 |
| 6723215 | Sputtering apparatus for forming a metal film using a magnetic field | Young-kyou Park, Hyeon-ill Um, Jai-kwang Shin | 2004-04-20 |