Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7208878 | Method of manufacturing a rotation-magnetron-in-magnetron (RMIM) electrode | Jai-kwang Shin, Seong-gu Kim, Young-kyou Park | 2007-04-24 |
| 7119489 | Rotation-magnetron-in-magnetron (RMIM) electrode, method of manufacturing the RMIM electrode, and sputtering apparatus including the RMIM electrode | Jai-kwang Shin, Seong-gu Kim, Young-kyou Park | 2006-10-10 |
| 6723215 | Sputtering apparatus for forming a metal film using a magnetic field | Young-kyou Park, Jai-kwang Shin, Seong-gu Kim | 2004-04-20 |