Issued Patents All Time
Showing 101–117 of 117 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5858577 | Phase shift mask and fabrication method thereof | Tae Gak Kim | 1999-01-12 |
| 5856049 | Phase shift mask and method for manufacturing same | — | 1999-01-05 |
| 5851708 | Method for fabricating phase shifting mask and a phase shifting mask | — | 1998-12-22 |
| 5851705 | Method for manufacturing a self-aligned type out-rigger phase shift mask | — | 1998-12-22 |
| 5824438 | Structure of phase shifting mask and method of manufacturing the same comprising an adhesive layer between a phase shift layer and a light blocking layer | Yong Kyoo Choi, Chan Min Park | 1998-10-20 |
| 5824439 | Phase shifiting mask and method of manufacturing the same | — | 1998-10-20 |
| 5786111 | Phase shift mask and fabricating method thereof | — | 1998-07-28 |
| 5770350 | Method for forming pattern using multilayer resist | — | 1998-06-23 |
| 5766805 | Method for fabricating phase shift mask | Oh Seok Han | 1998-06-16 |
| 5725969 | Method of manufacturing phase-shifting mask comprising a light shield pattern on a phase-shifting attenuatting layer | — | 1998-03-10 |
| 5700626 | Method for forming multi-layer resist pattern | Hun Hur, Young Jin SONG | 1997-12-23 |
| 5637425 | Method for fabricating phase shift mask comprising a polymethylmethacrylate phase shift film | Suk-Bin Han | 1997-06-10 |
| 5609994 | Method for patterning photoresist film having a stepwise thermal treatment | — | 1997-03-11 |
| 5525192 | Method for forming a submicron resist pattern | Keom J. Park | 1996-06-11 |
| 5455131 | Method for fabrication of lithography mask | Chan Hee Kang | 1995-10-03 |
| 5437947 | Phase shifting mask and method of manufacturing the same | Hun Hur | 1995-08-01 |
| 5376227 | Multilevel resist process | — | 1994-12-27 |