Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6637443 | Semiconductor wafer cleaning apparatus and method | Yun Jun Huh, Jae-Jeong Kim | 2003-10-28 |
| 6532976 | Semiconductor wafer cleaning apparatus | Yun Jun Huh, Jae-Jeong Kim | 2003-03-18 |
| 6107173 | Method of manufacturing semiconductor device | — | 2000-08-22 |
| 6103603 | Method of fabricating gate electrodes of twin-well CMOS device | — | 2000-08-15 |
| 5976311 | Semiconductor wafer wet processing device | — | 1999-11-02 |
| 5948173 | System and method for cleaning a semiconductor wafer | Yun Jun Huh, Jae-Jeong Kim | 1999-09-07 |
| 5913429 | Wafer supporting and/or conveying apparatus | — | 1999-06-22 |
| 5885360 | Semiconductor wafer cleaning apparatus | Yun Jun Huh | 1999-03-23 |
| 5873381 | Wet treatment apparatus for semiconductor wafer | — | 1999-02-23 |
| 5850841 | Cleaning apparatus of semiconductor device | Yun Jun Huh | 1998-12-22 |
| 5845663 | Wafer wet processing device | — | 1998-12-08 |
| 5842491 | Semiconductor wafer cleaning apparatus | Yun Jun Huh | 1998-12-01 |
| 5839456 | Wafer wet treating apparatus | — | 1998-11-24 |
| 5799678 | Apparatus for cleansing semiconductor wafer | — | 1998-09-01 |
| 5743280 | Apparatus for cleansing semiconductor wafer | — | 1998-04-28 |
| 5673713 | Apparatus for cleansing semiconductor wafer | — | 1997-10-07 |
| 5637425 | Method for fabricating phase shift mask comprising a polymethylmethacrylate phase shift film | Jun Seok Lee | 1997-06-10 |
| 5622636 | Etch-ending point measuring method for wet-etch process | Yun Jun Huh, Sang-jin Choi | 1997-04-22 |