| 10712662 |
Methods of forming patterns using compositions for an underlayer of photoresist |
Jung-Youl Lee, Kyung-Lyul Moon, Yool Kang, Hyun Jin Kim, Yu-Jin Jeoung +1 more |
2020-07-14 |
| 9528949 |
Methods of detecting inhomogeneity of a layer and apparatus for performing the same |
Jung-Hoon Kim, Chang-Ho Lee, Dong Won Kim, Jae-Ho Kim, Jung-Dae Park +2 more |
2016-12-27 |
| 8871423 |
Photoresist composition for fabricating probe array, method of fabricating probe array using the photoresist composition, composition for photosensitive type developed bottom anti-reflective coating, fabricating method of patterns using the same and fabricating method of semiconductor device using the same |
Hyo-Jin Yun, Jae-Ho Kim, Young-Ho Kim, Boo-Deuk Kim, Myung-Sun Kim +3 more |
2014-10-28 |
| 7964332 |
Methods of forming a pattern of a semiconductor device |
Hyo-Jin Yun, Young-Ho Kim, Boo-Deuk Kim, Ji Man Park, Jae-Hee Choi |
2011-06-21 |
| 7442489 |
Photoresist composition and method of forming a photoresist pattern using the same |
Boo-Deuk Kim, Jae-Ho Kim, Young-Ho Kim, Kyoung-Mi Kim |
2008-10-28 |
| 7026497 |
Adhesive compound and method for forming photoresist pattern using the same |
Boo-Deuk Kim, Kyoung-Mi Kim, Young-Ho Kim |
2006-04-11 |
| 6838223 |
Compositions for anti-reflective light absorbing layer and method for forming patterns in semiconductor device using the same |
Sang-Woong Yoon, Hoe-Sik Chung, Young-Ho Kim |
2005-01-04 |
