| 12009255 |
Method of manufacturing semiconductor device including laser treatment for contact plug |
— |
2024-06-11 |
| 11798824 |
Heating device for heating object material using laser beam and indirect heating method using laser beam |
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2023-10-24 |
| 11488828 |
Method of indirect heating using laser |
— |
2022-11-01 |
| 11462424 |
Heating device for heating object material using laser beam and indirect heating method using laser beam |
— |
2022-10-04 |
| 10978304 |
Method of indirect heating using laser |
— |
2021-04-13 |
| 9190495 |
Recessed channel array transistors, and semiconductor devices including a recessed channel array transistor |
Dong Chan Kim, Seong Hoon Jeong, Si-Young Choi, Yu-Gyun Shin, Tai-Su Park +2 more |
2015-11-17 |
| 8691649 |
Methods of forming recessed channel array transistors and methods of manufacturing semiconductor devices |
Tai-Su Park, Jung-Sup Oh, Gun-Joong Lee, Jung-Soo An, Dong-Kyu Lee +7 more |
2014-04-08 |
| 8501611 |
Methods of forming integrated circuit devices having electrically conductive layers therein with partially nitridated sidewalls |
Si-Young Choi, Yu-Gyun Shin, Tai-Su Park, Dong Chan Kim, Jong-Ryeol Yoo +2 more |
2013-08-06 |
| 8252681 |
Methods of forming integrated circuit devices having electrically conductive layers therein with partially nitridated sidewalls |
Si-Young Choi, Yu-Gyun Shin, Tai-Su Park, Dong Chan Kim, Jong-Ryeol Yoo +2 more |
2012-08-28 |
| 7968442 |
Fin field effect transistor and method of fabricating the same |
Jong-Hoon Kang, Tai-Su Park, Dong Chan Kim, Yu-Gyun Shin, Seong Hoon Jeong |
2011-06-28 |
| 7498213 |
Methods of fabricating a semiconductor substrate for reducing wafer warpage |
Won Jin Kim, Young-Wook Park |
2009-03-03 |
| 7129174 |
Methods of fabricating a semiconductor substrate for reducing wafer warpage |
Won Jin Kim, Young-Wook Park |
2006-10-31 |
| 6930062 |
Methods of forming an oxide layer in a transistor having a recessed gate |
Sang-Jin Hyun, Yu-Gyun Shin, Bon-Young Koo, Sug-hun Hong, Taek-Soo Jeon |
2005-08-16 |
