Issued Patents All Time
Showing 26–41 of 41 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6889447 | Method for drying a wafer and apparatus for performing the same | Kwang-Wook Lee, Yong-Sun Ko | 2005-05-10 |
| 6875706 | Cleaning solution and method of cleaning a semiconductor device using the same | Kwang-Wook Lee, Dae-Hyuk Chung, Yong-Sun Ko | 2005-04-05 |
| 6837943 | Method and apparatus for cleaning a semiconductor substrate | Kwang-Wook Lee | 2005-01-04 |
| 6838330 | Method of forming a contact hole of a semiconductor device | Bong-Ho Moon, Ju-Yun Cheol, Yong-Sun Ko | 2005-01-04 |
| 6831012 | Method for forming a silicide film of a semiconductor device | Dae-Keun Kang, Yong-Sun Ko, Byoung-Moon Yoon | 2004-12-14 |
| 6802911 | Method for cleaning damaged layers and polymer residue from semiconductor device | Keum-Joo Lee, Yong-Sun Ko | 2004-10-12 |
| 6717231 | Trench isolation regions having recess-inhibiting layers therein that protect against overetching | Sung-Eui Kim, Keum-Joo Lee, Young-sun Koh, Dong-Ho Ahn, Moon-han Park +1 more | 2004-04-06 |
| 6706633 | Method of forming a self-aligned contact pad for use in a semiconductor device | Dae-Hyuk Chung, Han-Joo Lee | 2004-03-16 |
| 6700153 | One-cylinder stack capacitor and method for fabricating the same | Jung-Hwan Oh, Ki-Hyun Hwang, Jae Young Park, Young-Wook Park | 2004-03-02 |
| 6699773 | Shallow trench isolation type semiconductor device and method of forming the same | Keum-Joo Lee, Young Min Kwon, Chang-Lyoung Song | 2004-03-02 |
| 6548853 | Cylindrical capacitors having a stepped sidewall and methods for fabricating the same | Si-Youn Kim, Yoo-Sang Hwang, Hoon Jung | 2003-04-15 |
| 6500726 | Shallow trench isolation type semiconductor device and method of forming the same | Keum-Joo Lee, Young Min Kwon, Chang-Lyoung Song | 2002-12-31 |
| 6461937 | Methods of forming trench isolation regions having recess-inhibiting layers therein that protect against overetching | Sung-Eui Kim, Keum-Joo Lee, Young-sun Koh, Dong-Ho Ahn, Moon-han Park +1 more | 2002-10-08 |
| 6369008 | Cleaning solutions for removing contaminants from the surfaces of semiconductor substrates and cleaning methods using the same | Heon-jae Ha, Dae-Hyuk Chung, Yong-Sun Ko | 2002-04-09 |
| 6331478 | Methods for manufacturing semiconductor devices having chamfered metal silicide layers | Keum-Joo Lee, Yong-Sun Ko, Chang-Iyoung Song | 2001-12-18 |
| 6146994 | Method for forming self-aligned selective silicide layer using chemical mechanical polishing in merged DRAM logic | — | 2000-11-14 |