Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11729896 | Apparatus for generating extreme ultraviolet (EUV), method of manufacturing the same, and EUV system | Jihoon Na, Mun Ja Kim, Jaewhan Sung, Byungchul Yoo, Jibeom Yoo +2 more | 2023-08-15 |
| 11531277 | Extreme ultraviolet (EUV) mask inspection system, a load-lock chamber included therein, and a method for inspecting an EUV mask using the EUV mask inspection system | Jihoon Na, Sungho Kang, Jaewhan Sung, Hak-Seok Lee | 2022-12-20 |