Issued Patents All Time
Showing 26–29 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7656568 | Optical switch using frequency-based addressing in a microelectromechanical systems array | Richard S. Muller | 2010-02-02 |
| 7573022 | Method for fabricating vertically-offset interdigitated comb actuator device | David Garmire, Richard S. Muller, James Demmel | 2009-08-11 |
| 7564559 | MEMS-based, phase-shifting interferometer | Richard S. Muller, David Garmire, James Demmel, Rishi Kant | 2009-07-21 |
| 7355793 | Optical system applicable to improving the dynamic range of Shack-Hartmann sensors | Richard S. Muller | 2008-04-08 |