Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10597495 | Aged polymeric silsesquioxanes | Peng-Fei Fu | 2020-03-24 |
| 10049882 | Method for fabricating semiconductor device including forming a dielectric layer on a structure having a height difference using ALD | Won Woong Chung, Sun Hye HWANG, Youn-Joung Cho, Jung-Sik Choi, Xiaobing Zhou +2 more | 2018-08-14 |
| 7189664 | Method for producing hydrogenated silicon-oxycarbide films | Mark Loboda | 2007-03-13 |
| 6984594 | Deposition method of insulating layers having low dielectric constant of semiconductor devices | Sung-Hoon Yang, Glenn A. Cerny, Kyuha Chung, Wan-Shick Hong | 2006-01-10 |
| 6667553 | H:SiOC coated substrates | Glenn A. Cerny, Mark Loboda | 2003-12-23 |
| 6593248 | Method for producing hydrogenated silicon oxycarbide films having low dielectric constant | Mark Loboda | 2003-07-15 |
| 6372672 | Method of forming a silicon nitride layer in a semiconductor device | Do Hyung Kim, Ju-Bum Lee | 2002-04-16 |
| 6337282 | Method for forming a dielectric layer | Ju-Wan Kim, Sung Jin Kim, Jue-Goo Lee, Chang-Hyun Cho, Gwan-Hyeob Koh | 2002-01-08 |
| 6117785 | Multiple etch methods for forming contact holes in microelectronic devices including SOG layers and capping layers thereon | Hae-jeong Lee, Ji Hyun Choi, Ju-Seon Goo | 2000-09-12 |
| 6057251 | Method for forming interlevel dielectric layer in semiconductor device using electron beams | Ju-Seon Goo, Seong-Ho Kim, Hae-jeong Lee | 2000-05-02 |
| 5989983 | Method of fabricating and curing spin-on-glass layers by electron beam irradiation | Ju-Seon Goo, Ji Hyun Choi, Hae-jeong Lee | 1999-11-23 |
| 5866476 | Methods for forming moisture blocking layers | Ji Hyun Choi, Hae-jeong Lee, Ju-Son Gou | 1999-02-02 |
| 5629238 | Method for forming conductive line of semiconductor device | Ji Hyun Choi, Hong-Jae Shin, U-in Chung | 1997-05-13 |