Issued Patents All Time
Showing 25 most recent of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12264074 | Synthesis of 1,1,1-trichlorodisilane | Andrew Millward, Brian D. Rekken, Travis Sunderland, Jeanette Young | 2025-04-01 |
| 12091364 | MAX phase material, preparation method therefor and application thereof | Qing Huang, Mian Li, Youbing Li, Kan Luo, Shiyu Du +1 more | 2024-09-17 |
| 11691993 | 1,1,1-tris(organoamino)disilane compounds and method of preparing same | Byung K. HWANG | 2023-07-04 |
| 11598002 | Thio(di)silanes | Noel Mower Chang, Byung K. HWANG, Brian D. Rekken, Vasgen Aram Shamamian, Xianghuai Wang | 2023-03-07 |
| 11584767 | Method of making a halosiloxane | Noel Mower Chang, Barry Ketola, Andrew Millward | 2023-02-21 |
| 11479858 | Thio(di)silanes | Noel Mower Chang, Byung K. HWANG, Brian D. Rekken, Vasgen Aram Shamamian, Xianghuai Wang | 2022-10-25 |
| 11370666 | Method of preparing pentachlorodisilane purified reaction product comprising same | Barry Ketola, Noel MOWER CHANG, Jeanette Young | 2022-06-28 |
| 11142462 | Trichlorodisilane | Byung K. HWANG, Travis Sunderland | 2021-10-12 |
| 11117807 | Method of making aluminum-free neopentasilane | — | 2021-09-14 |
| 11111256 | High purity trisilylamine, methods of making, and use | Barry Ketola, Jesse A. Maddock, Brian D. Rekken, Michael Telgenhoff | 2021-09-07 |
| 11098068 | Method of making a halosiloxane | Noel Mower Chang, Barry Ketola, Andrew Millward | 2021-08-24 |
| 11091649 | 2,2,4,4-tetrasilylpentasilane and its compositions, methods and uses | — | 2021-08-17 |
| 11040989 | Tris(disilanyl)amine | Brian D. Rekken, Byung K. HWANG, Barry Ketola | 2021-06-22 |
| 10875877 | Method for making an organoaminosilane; a method for making a silylamine from the organoaminosilane | Barry Ketola, Jesse A. Maddock, Brian D. Rekken, Michael Telgenhoff | 2020-12-29 |
| 10858378 | Synthesis of disilanylamines through transamination | — | 2020-12-08 |
| 10157735 | Pentachlorodisilane | — | 2018-12-18 |
| 10049882 | Method for fabricating semiconductor device including forming a dielectric layer on a structure having a height difference using ALD | Won Woong Chung, Sun Hye HWANG, Youn-Joung Cho, Jung-Sik Choi, Brian D. Rekken +2 more | 2018-08-14 |
| 10030037 | Diaminosilane compounds | Brian D. Rekken | 2018-07-24 |
| 10030038 | Monoaminosilane compounds | Brian D. Rekken | 2018-07-24 |
| 9926203 | Method of making 2,2,4,4-tetrasilylpentasilane | — | 2018-03-27 |
| 9899392 | Silicon precursor, method of forming a layer using the same, and method of fabricating semiconductor device using the same | JunHyun Cho, Michael Telgenhoff, Kyunghye Jung, Younjoung Cho | 2018-02-20 |
| 9840523 | Process of synthesizing diisopropylamino-disilanes | Barry Ketola, Brian D. Rekken | 2017-12-12 |
| 9518072 | Ester-functional silanes and the preparation and use thereof; and use of iminium compounds as phase transfer catalysts | Michael Backer, John Gohndrone, Don Lee Kleyer | 2016-12-13 |
| 9249164 | Process for preparing an acryloyloxysilane | Peter Cheshire Hupfield | 2016-02-02 |
| 9117664 | CVD precursors | — | 2015-08-25 |