Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9113543 | Device and use of the device for measuring the density and/or the electron temperature and/or the collision frequency of a plasma | Ralf Brinkmann, Jens Oberrath, Peter Awakowicz, Martin Lapke, Thomas Musch +5 more | 2015-08-18 |
| 8933629 | Method for controlling ion energy in radio frequency plasmas | Brian George Heil, Uwe Czarnetzki, Ralf Brinkmann | 2015-01-13 |
| 8643280 | Method for controlling ion energy in radio frequency plasmas | Brian George Heil, Uwe Czarnetzki, Ralf Brinkmann | 2014-02-04 |