Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8933629 | Method for controlling ion energy in radio frequency plasmas | Brian George Heil, Ralf Brinkmann, Thomas Mussenbrock | 2015-01-13 |
| 8643280 | Method for controlling ion energy in radio frequency plasmas | Brian George Heil, Ralf Brinkmann, Thomas Mussenbrock | 2014-02-04 |