Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7019845 | Measuring elastic moduli of dielectric thin films using an optical metrology system | Sean P. Leary, Guray Tas, Christopher Morath, Michael Kotelyanskii, Tong Zheng +3 more | 2006-03-28 |