Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11578967 | Wafer inspection system including a laser triangulation sensor | John Schaefer, Nicholas Smith, Jeffrey P. Treptau | 2023-02-14 |
| 9594230 | On-axis focus sensor and method | Dennis L. Ohren, Andrew E. Rotering | 2017-03-14 |
| 9062859 | Wafer edge inspection illumination system | Ajay Pai, Antony Ravi Philip, Tuan D. Le | 2015-06-23 |
| 8426223 | Wafer edge inspection | Ajay Pai, Antony Ravi Philip, Tuan D. Le | 2013-04-23 |