Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 11578967 | Wafer inspection system including a laser triangulation sensor | John Schaefer, Nicholas Smith, Jeffrey P. Treptau | 2023-02-14 | |
| 9594230 | On-axis focus sensor and method | Dennis L. Ohren, Andrew E. Rotering | 2017-03-14 | $3,453,000 |
| 9062859 | Wafer edge inspection illumination system | Ajay Pai, Antony Ravi Philip, Tuan D. Le | 2015-06-23 | $3,075,000 |
| 8426223 | Wafer edge inspection | Ajay Pai, Antony Ravi Philip, Tuan D. Le | 2013-04-23 | $1,578,000 |