Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9062859 | Wafer edge inspection illumination system | Christopher Voges, Ajay Pai, Tuan D. Le | 2015-06-23 |
| 8492178 | Method of monitoring fabrication processing including edge bead removal processing | Alan Carlson, Ajay Pai, Tuan D. Le | 2013-07-23 |
| 8426223 | Wafer edge inspection | Christopher Voges, Ajay Pai, Tuan D. Le | 2013-04-23 |