Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9437466 | Storage container, shutter opening/closing unit of storage container, and wafer stocker using storage container and shutter opening/closing unit | Katsunori Sakata | 2016-09-06 |
| 8348583 | Container and loader for substrate | Toshiaki Fujii, Osamu Horita, Koji Ohyama, Toshiya Nakayama, Mineo Kinpara | 2013-01-08 |
| 7933665 | Method and system for teaching reference position of semiconductor wafer in automated wafer handling manufacturing equipment | Yasuhisa Sato, Tetsuya Nagao, Toshiyuki Ikeda | 2011-04-26 |
| 7635244 | Sheet-like electronic component clean transfer device and sheet-like electronic component manufacturing system | — | 2009-12-22 |
| 7425783 | Linear motor | — | 2008-09-16 |
| 4416213 | Rotary coating apparatus | — | 1983-11-22 |