Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12387959 | Transport device having local purge function | Yasuhisa Sato, Hidekazu Okutsu, Kenji Hirota | 2025-08-12 |
| 11232964 | Pod opener | — | 2022-01-25 |
| 11227784 | Thin plate substrate-holding device and transfer robot provided with this holding device | Yasuhisa Sato | 2022-01-18 |
| 11107722 | Thin-plate substrate holding finger and transfer robot provided with said finger | — | 2021-08-31 |
| 10354903 | Load port and load port atmosphere replacing method | Hidekazu Okutsu | 2019-07-16 |
| 9437466 | Storage container, shutter opening/closing unit of storage container, and wafer stocker using storage container and shutter opening/closing unit | Fumio Sakiya | 2016-09-06 |
| 6652212 | Cylinder, load port using it, and production system | Shinyo Kimoto, Kenji Tokunaga, Norio Kajita | 2003-11-25 |