Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11054250 | Multi-channel overlay metrology | Gangadhara Raja Muthinti, Siva Kanakasabapathy, Nelson Felix | 2021-07-06 |
| 8025837 | Generator for flux specific bursts on nano-particles | Martin Richardson, Kazutoshi Takenoshita | 2011-09-27 |
| 7361204 | Generator for flux specific bursts of nano-particles | Martin Richardson, Kazutoshi Takenoshita | 2008-04-22 |