Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8017305 | Pattern forming method, semiconductor device manufacturing method and exposure mask set | Takeo Ishibashi, Takayuki Saito, Shuji Nakao | 2011-09-13 |
| 7670756 | Pattern forming method, semiconductor device manufacturing method and exposure mask set | Takeo Ishibashi, Takayuki Saito, Shuji Nakao | 2010-03-02 |
| 7459265 | Pattern forming method, semiconductor device manufacturing method and exposure mask set | Takeo Ishibashi, Takayuki Saito, Shuji Nakao | 2008-12-02 |